ISO 11505:2012

Surface chemical analysis — General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry

ISO 11505:2013 describes a glow discharge optical emission spectrometric (GD-OES) method for the determination of the thickness, mass per unit area and chemical composition of surface layer films.

It is limited to a description of general procedures of quantification of GD-OES and is not applicable directly for the quantification of individual materials having various thicknesses and elements to be determined.

Edition	2012
Published Date	2012
Published By	International Standardization Organisation
Page Count	33