ISO 14644-6:2007
Cleanrooms and associated controlled environments — Part 6: Vocabulary
Cleanrooms and associated controlled environments — Part 6: Vocabulary
Referenced standards
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Cleanrooms and associated controlled environments — Part 6: Vocabulary
ISO 14644-6:2007 establishes a vocabulary of terms and definitions related to cleanrooms and associated controlled environments.
| Edition | 2007 |
|---|---|
| Standard Part No | 6 |
| Published Date | 2007 |
| Published By | International Standardization Organisation |
| Page Count | 34 |