ISO 15471:2004
Surface chemical analysis — Auger electron spectroscopy — Description of selected instrumental performance parameters
Surface chemical analysis — Auger electron spectroscopy — Description of selected instrumental performance parameters
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Surface chemical analysis — Auger electron spectroscopy — Description of selected instrumental performance parameters
ISO 15471:2004 describes the way in which specific aspects of the performance of an Auger electron spectrometer shall be described.
| Edition | 2004 |
|---|---|
| Published Date | 2004 |
| Published By | International Standardization Organisation |
| Page Count | 5 |