ISO 15932:2013

Microbeam analysis — Analytical electron microscopy — Vocabulary

ISO 15932:2013 defines terms used in the practice of AEM. It covers both general and specific concepts classified according to their hierarchy in a systematic order. It is applicable to all standardization documents relevant to the practice of AEM. In addition, some parts of this International Standard are applicable to those documents relevant to the practice of related fields (e.g. TEM, STEM, SEM, EPMA, EDX) for the definition of those terms common to them.