ISO 16129:2018

Surface chemical analysis — X-ray photoelectron spectroscopy — Procedures for assessing the day-to-day performance of an X-ray photoelectron spectrometer

This document is designed to allow the user to assess, on a regular basis, several key parameters of an X-ray photoelectron spectrometer. It is not intended to provide an exhaustive performance check, but instead provides a rapid set of tests that can be conducted frequently.

Aspects of instrument behaviour covered by this document include the vacuum, measurements of spectra of conductive or non-conductive test specimens and the current state of the X-ray source. Other important aspects of the instrument performance (e.g. lateral resolution) fall outside the scope of this document.

The document is intended for use with commercial X-ray photoelectron spectrometers equipped with a monochromated Al Ka X-ray source or with an unmonochromated Al or Mg Ka X-ray source.

Edition	2018
Published Date	2018
Published By	International Standardization Organisation
Page Count	18