ISO 17973:2024

Surface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysis

This document specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3?eV, for general analytical use in identifying elements at surfaces. This document also specifies a method for establishing a calibration schedule.

It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5?% and the modulation amplitude for the differential mode, if used, is 2?eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4?keV or higher beam energy.

Edition	2024
Published Date	2024
Published By	International Standardization Organisation
Page Count	11