ISO 18115-3:2022
Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis
Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis
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ISO 18115-3:2022
Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis
Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis
This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.
| Edition | 2022 |
|---|---|
| Standard Part No | 3 |
| Published Date | 2022 |
| Published By | International Standardization Organisation |
| Page Count | 35 |