ISO 19606:2024

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy

This document specifies a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy. This method applies to surfaces with an arithmetical mean roughness, R_a, in the range of about 1?nm to 30?nm and a mean width of roughness profile elements, R_sm, in the range of about 0,04?μm to 2,5?μm.