ISO 20263:2024

Microbeam analysis — Analytical electron microscopy — Method for the determination of interface position in the cross-sectional image of the layered materials

This document specifies a procedure for the determination of the averaged interface position between two different layered materials recorded in the cross-sectional image of the multi-layered material. This document does not apply for determining the simulated interface of the multi-layered materials expected through the multi-slice simulation (MSS) method.

This document is applicable to the cross-sectional images of multi-layered materials recorded using a transmission electron microscope (TEM) or a scanning transmission electron microscope (STEM) and cross-sectional elemental mapping images using an energy dispersive X-ray spectrometer (EDS) or an electron energy loss spectrometer (EELS). This document is also applicable to digitized images recorded on an image sensor built into a digital camera, a digital memory set in the PC or an imaging plate, where the digitalized image is obtained by converting an analogue image recorded on photographic film using an image scanner.

Edition	2024
Published Date	2024
Published By	International Standardization Organisation
Page Count	47