ISO 21270:2004

Surface chemical analysis — X-ray photoelectron and Auger electron spectrometers — Linearity of intensity scale

ISO 21270:2004 specifies two methods for determining the maximum count rate for an acceptable limit of divergence from linearity of the intensity scale of Auger and X-ray photoelectron spectrometers. It also includes methods to correct for intensity non-linearities so that a higher maximum count rate can be employed for those spectrometers for which the relevant correction equations have been shown to be valid.