ISO 21360-6:2023

Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps

This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps.

It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.

Edition	2023
Standard Part No	6
Published Date	2023
Published By	International Standardization Organisation
Page Count	12