ISO 23131:2021

Ellipsometry — Principles

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.

It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC?Guide?98-3.

Edition	2021
Published Date	2021
Published By	International Standardization Organisation
Page Count	15