ISO 23131-3:2026

Ellipsometry Part 3: Transparent single layer model (Edition 1, 2026)

Abstract
This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.

General information
Status : Published
Publication date : 2026-01
Stage : International Standard published
Edition : 1
Number of pages : 29