ISO 23216:2021

Carbon based films — Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry

This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n–k plane.

It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.

It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.

Edition	2021
Published Date	2021
Published By	International Standardization Organisation
Page Count	7