ISO 23833:2013

Microbeam analysis — Electron probe microanalysis (EPMA) — Vocabulary

ISO 23833:2013 defines terms used in the practices of electron probe microanalysis (EPMA). It covers both general and specific concepts classified according to their hierarchy in a systematic order.

ISO 23833:2013 is applicable to all standardization documents relevant to the practices of EPMA. In addition, some parts of ISO 23833:2013 are applicable to those documents relevant to the practices of related fields (SEM, AEM, EDX, etc.) for definition of those terms common to them.

Edition	2013
Published Date	2013
Published By	International Standardization Organisation
Page Count	27