ISO 25178-602:2025

Geometrical product specifications (GPS) — Surface texture: Areal — Part 602: Design and characteristics of non-contact (confocal chromatic probe) instruments

This document specifies the design and metrological characteristics of a particular non-contact instrument for measuring surface texture using a confocal chromatic probe based on axial chromatic aberration of white light. Additional metrological characteristics can be found in ISO?25178-600. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.