ISO 25178-604:2013

Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments

Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments

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Referenced standards

ISO 14406:2010ISO 14978:2006ISO 25178-2:2012ISO 25178-601:2010ISO 25178-602:2010ISO 3274:1996ISO 4287:1997ISO/IEC GUIDE 99:2007
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ISO 25178-604:2013

Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments

Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments

ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.

Edition2013
Standard Part No604
Published Date2013
Published ByInternational Standardization Organisation
Page Count41