ISO 25178-604:2013
Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments
Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments
Referenced standards
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Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments
Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments
ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.
| Edition | 2013 |
|---|---|
| Standard Part No | 604 |
| Published Date | 2013 |
| Published By | International Standardization Organisation |
| Page Count | 41 |