ISO/TR 14999-3:2005
Optics and photonics — Interferometric measurement of optical elements and optical systems — Part 3: Calibration and validation of interferometric test equipment and measurements
Optics and photonics — Interferometric measurement of optical elements and optical systems — Part 3: Calibration and validation of interferometric test equipment and measurements
Optics and photonics — Interferometric measurement of optical elements and optical systems — Part 3: Calibration and validation of interferometric test equipment and measurements
ISO/TR 14999-3:2005 discusses sources of error and the separation of errors into symmetric and non-symmetric parts. It also describes the reliance of measurements on the quality of a physical reference surface and the development of test procedures capable of achieving absolute calibration.
| Edition | 2005 |
|---|---|
| Standard Part No | 3 |
| Published Date | 2005 |
| Published By | International Standardization Organisation/Technical Reference |
| Page Count | 44 |