ISO/TR 15969:2021
Surface chemical analysis — Depth profiling — Measurement of sputtered depth
Surface chemical analysis — Depth profiling — Measurement of sputtered depth
Referenced standards
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Surface chemical analysis — Depth profiling — Measurement of sputtered depth
Surface chemical analysis — Depth profiling — Measurement of sputtered depth
This document provides guidelines for measuring the sputtered depth in sputtered depth profiling.?
The methods of sputtered depth measurement described in this document are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to several micrometres. The depth typically determined by this approach is between 1 nm to 500 μm.
| Edition | 2021 |
|---|---|
| Published Date | 2021 |
| Published By | International Standardization Organisation/Technical Reference |
| Page Count | 13 |