ISO/TR 18394:2016

Surface chemical analysis — Auger electron spectroscopy — Derivation of chemical information

Surface chemical analysis — Auger electron spectroscopy — Derivation of chemical information

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Referenced standards

ISO 18115-1:2013ISO 18115-2:2013
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ISO/TR 18394:2016

Surface chemical analysis — Auger electron spectroscopy — Derivation of chemical information

Surface chemical analysis — Auger electron spectroscopy — Derivation of chemical information

ISO/TR 18394:2016 provides guidelines for identifying chemical effects in X-ray or electron-excited Auger-electron spectra and for using these effects in chemical characterization.

Edition2016
Published Date2016
Published ByInternational Standardization Organisation/Technical Reference
Page Count24