ISO/TR 19319:2003
Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Determination of lateral resolution, analysis area, and sample area viewed by the analyser
Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Determination of lateral resolution, analysis area, and sample area viewed by the analyser
Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Determination of lateral resolution, analysis area, and sample area viewed by the analyser
ISO/TR 19319:2003 provides information for measuring (1) the lateral resolution, (2) the analysis area, and (3) the sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.
| Edition | 2003 |
|---|---|
| Published Date | 2003 |
| Published By | International Standardization Organisation/Technical Reference |
| Page Count | 17 |