ISO/TS 22933:2022
Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS
Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS
Referenced standards
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ISO/TS 22933:2022
Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS
Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS
This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.
| Edition | 2022 |
|---|---|
| Published Date | 2022 |
| Published By | ISO/TS |
| Page Count | 15 |