ISO/TS 25138:2010

Surface chemical analysis — Analysis of metal oxide films by glow-discharge optical-emission spectrometry

ISO/TS 25138:2010 describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.

The method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn and Al. Other elements that can be determined by the method are O, C, N, H, P and S.

Edition	2010
Published Date	2010
Published By	ISO/TS
Page Count	36